A device for placement of effluent comprises a substrate positioner, a deposition conduit, and a conduit positioner. The substrate positioner supports and positions a substrate on which effluent exiting from the deposition conduit is to be deposited. The conduit positioner moves an exit end of the deposition conduit relative to the substrate.
申请公布号
EP1552275(A2)
申请公布日期
2005.07.13
申请号
EP20030809509
申请日期
2003.08.21
申请人
INDIANA UNIVERSITY RESEARCH AND TECHNOLOGY CORPORATION
发明人
TEGELER, TONY, J.;MECHREF, YEHIA;BORAAS, KIRK, S.;REILLY, JAMES, P.;NOVOTNY, MILOS, V.
