APPARATUS FOR MANUFACTURING A MASK,申请号KR20030039207-传众专利搜索

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发明名称	APPARATUS FOR MANUFACTURING A MASK
摘要
申请公布号	KR100500582(B1)	申请公布日期	2005.07.12
申请号	KR20030039207	申请日期	2003.06.17
申请人		发明人
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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