发明名称 Method and test structure for determining resistances at a plurality of interconnected resistors in an integrated circuit
摘要 A method for determining resistances at a plurality of interconnected resistors in an integrated circuit and a resistor configuration in which the resistors are interconnected to form a ring structure. Two measurement pads are in each case provided at the nodes between two resistors. The measurement pads can be used for feeding in current and for measuring voltage according to the known four-point measurement method. The effect of the ring structure is that fewer measurement pads are required, in contrast to the customary series circuit of resistors. By way of example, in the case of a ring structure with four resistors, two measurement pads are advantageously saved. The consequently reduced chip area required for the ring structure is advantageous particularly in the case of test circuits, which can be arranged for example in the narrow sawing frame between two chips.
申请公布号 US6917208(B2) 申请公布日期 2005.07.12
申请号 US20030407714 申请日期 2003.04.04
申请人 INFINEON TECHNOLOGIES AG 发明人 LINDOLF JUERGEN;SUKMAN SIBINA
分类号 G01R31/28;G11C29/02;(IPC1-7):G01R27/08;G01R31/26;G01R31/02 主分类号 G01R31/28
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