发明名称 |
Evaluation method for polycrystalline silicon |
摘要 |
An evaluation method for polycrystalline silicon including the steps of immersing the polycrystalline silicon in an agent which is capable of dissolving the polycrystalline silicon, and counting the number of foreign particles in the agent. The polycrystalline silicon thus evaluated may be used as a material for pulling single crystal silicon. The evaluation method may further include a step of analyzing the composition of the foreign particles. In yet another aspect, the evaluation method may further include a step of subjecting the agent to a circulation filtering process prior to the immersion of the polycrystalline silicon in the agent.
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申请公布号 |
US6916657(B2) |
申请公布日期 |
2005.07.12 |
申请号 |
US20010867418 |
申请日期 |
2001.05.31 |
申请人 |
MITSUBISHI MATERIALS POLYCRYSTALLINE SILICON CORPORATION |
发明人 |
HORI KENJI;SASAKI GO |
分类号 |
G01N23/225;C30B15/00;C30B29/06;G01N1/28;G01N15/00;G01N33/00;G01N33/20;(IPC1-7):G01N23/083;G01T1/00 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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