发明名称 |
Methods and apparatus for maintaining a pressure within an environmentally controlled chamber |
摘要 |
In a first aspect, a system includes (1) a chamber; (2) a variable speed vacuum pump coupled to the chamber; and (3) a pressure controller coupled to the chamber. The pressure controller compares a set point pressure with a pressure measurement for the chamber and adjusts a flow of gas through the pressure controller based on a difference between the pressure measurement and the set point pressure. The system includes a pressure measurement device coupled to the chamber and to the pressure controller, and a main controller coupled to the variable speed vacuum pump, the pressure controller and the pressure measurement device. The pressure measurement device measures a pressure within the chamber and provides a pressure measurement to the pressure controller and the main controller. The main controller (1) adjusts a speed of the variable speed vacuum pump; and (2) provides the set point pressure to the pressure controller.
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申请公布号 |
US6916397(B2) |
申请公布日期 |
2005.07.12 |
申请号 |
US20020311131 |
申请日期 |
2002.12.13 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
PFEIFFER KENNETH;VERDICT GREGORY S. |
分类号 |
B01J3/00;B01J3/02;G05D16/20;H01L21/00;(IPC1-7):C23F1/00;H01L21/306;C23C16/00 |
主分类号 |
B01J3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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