发明名称 Semiconductor transistor using L-shaped spacer
摘要 The present invention provides a semiconductor transistor using an L-shaped spacer. The semiconductor transistor includes a gate pattern formed on a semiconductor substrate and an L-shaped third spacer formed beside the gate pattern and having a horizontal protruding portion. An L-shaped fourth spacer is formed between the third spacer and the gate pattern, and between the third spacer and the substrate. A high-concentration junction area is positioned in the substrate beyond the third spacer, and a low-concentration junction area is positioned under the horizontal protruding portion of the third spacer. A medium-concentration junction area is positioned between the high- and low-concentration junction areas.
申请公布号 US6917085(B2) 申请公布日期 2005.07.12
申请号 US20030728811 申请日期 2003.12.08
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 BAE GEUM-JONG;LEE NAE-IN;RHEE HWA-SUNG;KO YOUNG-GUN;CHOE TAE-HEE;KIM SANG-SU
分类号 H01L21/336;H01L29/78;(IPC1-7):H01L29/76 主分类号 H01L21/336
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