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发明名称
METHOD OF FORMING GATE PATTERN IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20050072316(A)
申请公布日期
2005.07.11
申请号
KR20040000707
申请日期
2004.01.06
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, NAM JOONG;KIM, MOO HYUN
分类号
H01L21/336;(IPC1-7):H01L21/336
主分类号
H01L21/336
代理机构
代理人
主权项
地址
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