| 摘要 |
A light irradiator for use in a laser annealer comprising a first splitting section (16) and a second splitting section (20) for splitting a single laser beam into n laser beams, and a section (21) for combining an m-th laser beam (m is an integer between 1 and n) exiting from the first splitting section (16) and an m-th laser beam exiting from the second splitting section (20). The first splitting section (16) and the second splitting section (20) are composed of an identical optical member and located at inverted positions.
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