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发明名称
СПОСОБ И УСТРОЙСТВО КОНДИЦИОНИРОВАНИЯ АТМОСФЕРЫ ДЛЯ ПОЛУПРОВОДНИКОВЫХ ПЛАСТИН И /ИЛИ ГИБРИДНЫХ ИНТЕГРАЛЬНЫХ СХЕМ
摘要
申请公布号
RU2004130436(A)
申请公布日期
2005.07.10
申请号
RU20040130436
申请日期
2003.04.15
申请人
ЭРС ЭЛЕКТРОНИК ГМБХ (DE)
发明人
РАЙТИНГЕР Эрих (DE)
分类号
G01R31/26;G01R31/30;H01L21/00;H01L21/02;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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