AFM CANTILEVER WITH NANOINDENTATION TEST FUNCTIONALITY
摘要
An atomic force microscope probe provides an indentation testing function in a direction along an axis. The probe has a tip and an arm structure holding the tip. The arm structure has one end mounted on a fixed stage, the other end coupled to the AFM tip, and a hollow frame having a shape symmetric with respect to a plane including an axis on which the two ends are positioned.
申请公布号
KR20050071964(A)
申请公布日期
2005.07.08
申请号
KR20040000376
申请日期
2004.01.05
申请人
KOREA INSTITUTE OF MACHINERY & MATERIALS
发明人
LEE, HAK JOO;KIM, JAE HYUN;OH, CHUNG SEOG;HAN, SEUNG WOO;HUR, SHIN;KO, SOON GYU;CHOI, BYUNG IK