| 摘要 |
PROBLEM TO BE SOLVED: To provide a transfer which is capable of self-correcting the error of a head moving destination position in the middle of a working term or the like. SOLUTION: There are included a proximity switch 15 which is fixed on a shaft part 12a for supporting a pickup head 14 and of which a detection center is turned in a +Z direction; and a movable IC tray 21 which comprises a standard 22 where a convex surface 22a is turned in a -Z direction and an IC pocket 23 at a position corresponding to design coordinates with a convex surface center P as a coordinate origin, and is provided to match the center P with a first point P<SB>0</SB>on a surface 1. If the IC test handler is set to a teaching mode, the detection center moves to an X-Y estimate position above the convex surface 22a. After the detection center approaches the convex surface until the proximity switch is turned on, the detection center moves in±X and±Y directions, respectively with the estimate position as a criterion. Pulse counts corresponding to moving amounts until turning off the proximity switch are acquired from a pulse counter, a real X-Y center position of the convex surface is calculated and stored, and the error in the X-Y position of a pocket is corrected. COPYRIGHT: (C)2005,JPO&NCIPI
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