| 摘要 |
PROBLEM TO BE SOLVED: To achieve uniformity of a cell gap, without using spacers. SOLUTION: A liquid-crystal-on-silicon device includes a wafer 110, glass 120, walls 122 formed to define a cell gap between the glass and the wafer, a piezoelectric body 120 attached to a surface of the wafer, and an electrode which is supplied with external power, to either expand and/or contract a thin piezoelectric layer. Further, the device includes a voltage detection section 140 for detecting the voltage generated by the deformation of the thin piezoelectric layer and a feedback control section for compensating for the deformation of the piezoelectric body, according to the voltage detected by the voltage detection unit. COPYRIGHT: (C)2005,JPO&NCIPI
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