| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum membrane forming device capable of safely performing discharge of process gas in a vacuum tank while keeping a vacuum pump system safe even when a part of a vacuum pump fails, and a method for controlling the vacuum pump for a vacuum membrane forming device. SOLUTION: The vacuum membrane forming device 1 is provided with a vacuum chamber 10 and at lease two stage vacuum pump of booster pumps A/B/C and a screw pump D in a order from the vacuum chamber 10 side for vacuuming and discharging the vacuum chamber 10. A vacuum pump drive control part controls to stop all vacuum pumps of the booster pump A/B/C and the screw pump D when a vacuum pump irregularity detection part detects irregularity of the booster pump A during operation of the screw pump D and the booster pumps A/B/C. COPYRIGHT: (C)2005,JPO&NCIPI
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