| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problems, such as stability of a sputter rate and the degradation in refractive index with visible light while a method of obtaining conductivity by firing a titanium oxide compact to be sintered in a nonoxidizing atmosphere to give rise to an oxygen defect and a method of adding indium oxide, zinc oxide, etc., as dopants to the titanium oxide compact to be sintered and subjecting the same to oxidation firing are devised as a method for manufacturing the conductive titanium oxide sintered compact. <P>SOLUTION: The conductive titanium oxide sintered compact containing titanium oxide as a principal component and containing at least one kind selected from niobium oxide and tantalum oxide as a dopant contains at least one kind selected from indium oxide, tin oxide, zinc oxide, gallium oxide, and aluminum oxide. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
