| 摘要 |
PROBLEM TO BE SOLVED: To calibrate an influence such as the fluctuation of an oxygen concentration in a midway optical path and to measure absolute transmissivity and transmissivity distribution more precisely, when a transmissivity measuring device and a wave front abberration measuring device wherein the variation of a light quantity due to a change in oxygen concentration in the optical path is necessary to be corrected are used to measure the transmissivity distribution while using a light source having an ultraviolet range of 200 nm or less. SOLUTION: The transmissivity measuring device using a light source having an ultraviolet range of 200 nm or less is provided with a transmissivity measuring mechanism that is provided with a light quantity monitor for measuring a light quantity of the light source, and at least two energy sensors on the incident side and the outgoing side of a test lens that can correct a change in light quantity caused by the variation of the oxygen concentration in the optical path or the like. COPYRIGHT: (C)2005,JPO&NCIPI
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