| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holding member capable of finely positioning a sample at low cost even in high magnification. SOLUTION: A sample holder 100 is in a plate shape and has an opening part 102 in the center. The opening part 102 is larger than the outer shape size of the sample 130 and large enough to fit the sample 130. The lateral width (b) of the sample holder 100 is larger than the lateral width (a) of a stage 150. Therefore, when the sample holder 100 is mounted on the stage 150, at least a portion of the outer shape projects from the outer shape of the stage 150. COPYRIGHT: (C)2005,JPO&NCIPI
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