| 摘要 |
PROBLEM TO BE SOLVED: To avoid the problem, wherein when an operator does not carry out maintenance checking, immediately after the period for maintenance checking comes, relevant components cannot be checked in this period for maintenance checking. SOLUTION: When the period of exchanging chemical filters comes, a dialog box 70 is displayed on the display screen which includes a message 71 to inform to exchange chemical filters and a "hold" button 73, a "pass" button 74 and a "work finished" button 75 corresponding to three operations by an operator. The operator operates the "hold" button 73 or the "pass" button 74, if he does not exchange the filters, immediately after the dialog box is displayed. When the "hold" button 73 is operated, a "maintenance" icon is displayed on the display 23. When the "pass" button 74 is operated, the dialog box 70 is again displayed based on the setting memorized in a setting section for redisplay timing. COPYRIGHT: (C)2005,JPO&NCIPI
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