| 摘要 |
PROBLEM TO BE SOLVED: To downsize a valve employed when exhausting air in a vacuum vessel by exhaust means, or the like. SOLUTION: A valve is equipped with a valve body 3 having a flow passage 2 through which fluid passes, with a fixed body 5 fixed to the valve body 3 to close the flow passage 2 and provided with a fixed opening part 4, and with a moving body 6 moved in a state of overlapping with the fixed body 5 and provided with a moving opening 7. Movement of the moving body 6 switches between a close state in which the fixed opening part 4 is sealed by the moving body 6 and in which the moving opening 7 is sealed by the fixed body 5 and a open state in which the fixed opening part 4 and the moving opening 7 overlap one another. COPYRIGHT: (C)2005,JPO&NCIPI
|
