发明名称 |
Depletion-merged FET design in bulk silicon |
摘要 |
Field effect transistors having reduced reverse body effects and reduced parasitic junction capacitance and a method of manufacture. The FET's comprise source/drain region pairs formed in said bulk silicon, each pair separated by a channel region. The depletion region associated with each of the source/drain regions of a pair are fully merged by selective ion implantation. A gate electrode is formed or deposited over the channel region of each FET in the normal manner.
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申请公布号 |
US2005145881(A1) |
申请公布日期 |
2005.07.07 |
申请号 |
US20030749080 |
申请日期 |
2003.12.30 |
申请人 |
CHENG SHUI-MING;FUNG KA-HING;WANG YIN-PIN |
发明人 |
CHENG SHUI-MING;FUNG KA-HING;WANG YIN-PIN |
分类号 |
H01L27/01;H01L29/08;H01L29/772;H01L29/78;H01L31/0328;(IPC1-7):H01L31/032 |
主分类号 |
H01L27/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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