发明名称 Depletion-merged FET design in bulk silicon
摘要 Field effect transistors having reduced reverse body effects and reduced parasitic junction capacitance and a method of manufacture. The FET's comprise source/drain region pairs formed in said bulk silicon, each pair separated by a channel region. The depletion region associated with each of the source/drain regions of a pair are fully merged by selective ion implantation. A gate electrode is formed or deposited over the channel region of each FET in the normal manner.
申请公布号 US2005145881(A1) 申请公布日期 2005.07.07
申请号 US20030749080 申请日期 2003.12.30
申请人 CHENG SHUI-MING;FUNG KA-HING;WANG YIN-PIN 发明人 CHENG SHUI-MING;FUNG KA-HING;WANG YIN-PIN
分类号 H01L27/01;H01L29/08;H01L29/772;H01L29/78;H01L31/0328;(IPC1-7):H01L31/032 主分类号 H01L27/01
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