A vacuum pumping arrangement is described for evacuating a load lock chamber. A booster pump comprises a molecular drag stage and a multi-stage centrifugal compressor mechanism. A backing pump comprises a multi-stage centrifugal compressor mechanism exhausting pumped fluid at atmospheric pressure. Such arrangements can reduce noise, size and vibration levels associated with conventional load lock pumping arrangements.
申请公布号
WO2005061896(A2)
申请公布日期
2005.07.07
申请号
WO2004GB05407
申请日期
2004.12.23
申请人
THE BOC GROUP PLC;LIU, MICHAEL, CHJUNG, KAU;DOWDESWELL, STEPHEN;SCHOFIELD, NIGEL, PAUL
发明人
LIU, MICHAEL, CHJUNG, KAU;DOWDESWELL, STEPHEN;SCHOFIELD, NIGEL, PAUL