发明名称 |
Infra red sensor, for a thermopile or bolometer, has a thin membrane supported on a substrate with an insulating film to carry an infra red absorption film as a detector |
摘要 |
<p>The infra red sensor (100) has a silicon semiconductor substrate (10), to support a membrane (13) as a thin section, together with an insulating film (12) of silicon oxide or silicon nitride on it. A detector (20), formed at least partially on the membrane, registers an electrical signal through the temperature change on receiving an infra red beam. An infra red absorption film (30), with a surface roughness of >=2 mu m, covers at least a part of the detector.</p> |
申请公布号 |
DE102004058393(A1) |
申请公布日期 |
2005.07.07 |
申请号 |
DE20041058393 |
申请日期 |
2004.12.03 |
申请人 |
DENSO CORP., KARIYA |
发明人 |
WATANABE, KAZUAKI;SUZUKI, YASUTOSHI |
分类号 |
G01J1/02;G01J5/02;G01J5/10;G01J5/12;G01J5/14;H01L35/14;H01L35/32;(IPC1-7):G01J5/12 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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