Resilient micromechanical substrate structure, for e.g. sensitive thermal- or chemical sensors, comprises membrane attached to opening by resilient bridging sections

摘要

The open side of the membrane (104) stretches over a depression (203). The membrane is joined to the edge of the depression by mechanical connectors (101). On azimuthal rotation of the membrane (104), these act as springs, exerting restorative rotational effect on the membrane, tending to return it to its original position.