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经营范围
发明名称
PLASMA ETCHING DEVICE
摘要
申请公布号
KR100499763(B1)
申请公布日期
2005.07.07
申请号
KR19997008142
申请日期
1999.09.07
申请人
发明人
分类号
C23F4/00;(IPC1-7):C23F4/00
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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