ION IMPLANTATION SYSTEM FOR IMPLANTING WORKPIECES,申请号KR19980706327-传众专利搜索

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发明名称	ION IMPLANTATION SYSTEM FOR IMPLANTING WORKPIECES
摘要
申请公布号	KR100474875(B1)	申请公布日期	2005.07.07
申请号	KR19980706327	申请日期	1998.08.14
申请人		发明人
分类号	H01L21/265;(IPC1-7):H01L21/265	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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