发明名称 PROCESS FOR APPLYING VINYL-BASED NAPHTHALENE DERIVATIVE, METHOD FOR PRODUCING VINYL-BASED NAPHTHALENE DERIVATIVE, POLYMER OF VINYL-BASED NAPHTHALENE DERIVATIVE, COMPOSITION FOR FORMING ANTIREFLECTION FILM AND ANTIREFLECTION FILM
摘要 <P>PROBLEM TO BE SOLVED: To provide a process for applying a vinyl-based naphthalenecarboxylic acid (derivative) and a vinyl-based naphthalenemethanol, with which technical idea or technical concept reaching application to an antireflection film having extremely excellent properties is created. <P>SOLUTION: The process for applying a naphthalene derivative comprises using a polymer obtained by polymerizing the naphthalene derivative represented by formula (1) or formula (5) (R<SP>1</SP>, R<SP>2</SP>and R<SP>3</SP>are each independently a hydrogen atom or a 1-10C monofunctional organic group) as a main component for an antireflection film. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005179461(A) 申请公布日期 2005.07.07
申请号 JP20030420621 申请日期 2003.12.18
申请人 JSR CORP 发明人 NISHIMURA ISAO;SUGITA HIKARI;TANAKA MASATO;KONNO KEIJI;NOMURA NAKAATSU;SHIMOKAWA TSUTOMU
分类号 G03F7/11;C07C29/147;C07C33/34;C07C67/343;C07C69/76;C08F12/22;C09D5/33;C09D125/02 主分类号 G03F7/11
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