| 摘要 |
PROBLEM TO BE SOLVED: To form an LDD layer or halo layer precisely even if there is a variation in finish sizes of a gate electrode. SOLUTION: When the actual measured value of the gate length L of the gate electrode 13 is shorter than designed one, injection energy is increased at the time of forming the halo layers 15a and 15b and the inclination of an injection angleθis made large. When the actual measured value of the gate length L of the gate electrode 13 is longer than the designed one, injection energy is reduced at the time of forming the halo layers 15a and 15b, and the inclination of the injection angleθis made small. COPYRIGHT: (C)2005,JPO&NCIPI
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