摘要 |
PROBLEM TO BE SOLVED: To provide a cold storage type freezer suitable to a cryo-pump capable of efficient gas condensation and regenerating treatment. SOLUTION: A displacer reciprocating along the axis of a cylinder is arranged within the cylinder opened at one end. The inner surface of a cooling stage air-tightly connected to the one end of the cylinder is exposed to the space within the cylinder. A refrigerant gas passage communicates with a cooling cavity partitioned by the cylinder, the displacer, and the cooling stage to introduce the refrigerant gas to the cooling cavity or recover the refrigerant gas from the cooling cavity. A cold storage agent is arranged in the refrigerant gas passage and performs heat exchange with the refrigerant gas carried in the refrigerant gas passage. A heat resistant member composed of a material lower in heat conductivity than the cooling stage is mounted on the cooling stage. A cooling panel arranged to surround the circumference of the cooling stage without contacting with the cooling stage is mounted on the heat resistant member. COPYRIGHT: (C)2005,JPO&NCIPI
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