| 摘要 |
PROBLEM TO BE SOLVED: To make the shrinkage quantity of an opening part constant irrelevantly to whether a resist pattern is fine or coarse by a method of reducing the opening part by baking the resist pattern having been formed and making resist flow. SOLUTION: This method includes: a stage (b) of coating a substrate to be processed with a resist layer 14, exposing the resist layer 14 by using a reticle 15 (a), and developing the resist layer 14 to form the pattern 14a, a stage (c) of forming an area 15 to be made to flow by lowering the glass transition temperature of resist resin on a side wall surface of the pattern 14a, and a stage (d) of obtaining a reduced opening part by making the flow area 16 flow by baking the pattern. COPYRIGHT: (C)2005,JPO&NCIPI |
