| 摘要 |
PROBLEM TO BE SOLVED: To provide a development apparatus which can better remove a resist agent. SOLUTION: In the development apparatus 20, a shaft member 33 in a turbulence generator 22 is vibrated by a vibrating motor 35 to transmit vibration to a blade member 34 attached to the shaft member 33 and to generate turbulence in a developer G. Consequently, impact of the turbulence reaches to every corner of a developed object 1 and the surface tension of the developer G is broken by the turbulence. So, even in the case that the developed object 1 has extremely fine parts and parts of complicated shapes, the developer G can be surely spread to such parts, and the resist agent 10 can be better removed. COPYRIGHT: (C)2005,JPO&NCIPI |
