| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibrator for freely setting a bias DC voltage for detecting electrostatic capacity with a simple structure, without being restricted by a bias DC voltage for driving to be applied on a driving part, and to provide a micro-resonator. SOLUTION: The vibrator 10 comprises a board 15; a lamination part formed on the board 15; first and second resonance parts 40, 50 having a support part 46, a plurality of fixed electrodes 22, 32, and mobile electrodes 24, 34 facing the fixed electrodes 22, 32, which are arranged on the lamination part; first elastic connection parts 44 for connecting the support 46 to the first resonance part 40; and second elastic connection parts 54 for connecting the first resonance part 40 to the second resonance part 50. COPYRIGHT: (C)2005,JPO&NCIPI
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