发明名称 AIR REMOVAL METHOD OF DISPENSER
摘要 PROBLEM TO BE SOLVED: To provide a method for preventing air from being included in connection between a liquid material supply container and a liquid material discharge device readily without requiring preparation of another component or the like. SOLUTION: The air removal method of a dispenser is for removing air 46 inside a dispenser 10 which has a resin container 12 for storing a resin 16 with an opening 20 below a reservoir 13 for storing the resin 16, a supply opening 24 which can be connected to the opening 20 of the resin container 12, a discharge opening 28 which is provided lower than the supply opening 24 and discharges the resin 16, a flow path 32 communicated from the supply opening 24 to the discharge opening 28, a plunger 34 disposed in the middle of the flow path 32, and a discharge device 14 with opening/closing valves 26, 30 for opening and closing the supply opening 24 and the discharge opening 28, respectively. The method has a step for connecting the supply opening 24 of the discharge device 14 turned upside down to the opening 20 of the resin container 12 turned upside down and a step for filling the flow path 32 with the resin 16 from the resin container 12. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005183787(A) 申请公布日期 2005.07.07
申请号 JP20030424818 申请日期 2003.12.22
申请人 APIC YAMADA CORP 发明人 GOTO NAOYA
分类号 H01L21/56;(IPC1-7):H01L21/56 主分类号 H01L21/56
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