| 摘要 |
PROBLEM TO BE SOLVED: To solve problems of a conventional ceramic heater that, a long cooling time is required, a temperature variation of its heater large, to need much time for the revision of a temperature or the like, and required heat uniformity and temperature responsiveness are not obtained. SOLUTION: The ceramic heater is provided with a heater comprising a resistance heater provided to one principal face of a ceramic plate body and a wafer heating face formed at the other principal face, a feeding terminal for supplying power to the resistance heater, and a case connected to the ceramic plate body in a way of enclosing the feeding terminal. The case is provided with a nozzle for cooling the heater and an opening, and a barrier is provided between the opening and the heater part. COPYRIGHT: (C)2005,JPO&NCIPI
|
