| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning exposure device having a panel-shaped light source using an EL layer capable of emitting line light of which the amount of luminescence is less varied in a lengthwise direction. SOLUTION: A panel-shaped light source 20 comprises a light-transmissive electrode 21 like a plane plate consisting of an ITO film being 0.1μm thick and 430mm square, an EL layer 22 being 0.1μm thick and 430mm square, and a linear electrode layer 24 having 4,300 linear electrodes 23 arranged in parallel in a Z direction. Each linear electrode 23 is an aluminum electrode being 50μm width, 430mm length, and 0.1μm thickness, and linear electrodes 23 are arranged at intervals of 100μm. The resistance of aluminum is 2.7×10<SP>-6</SP>Ωcm, and a resistance value between end parts 26a and 26b of each linear electrode 23 is 2.3 kΩand is much lower than that of a linear electrode being a conventional light-transmissive electrode. Therefore, voltage drop in the lengthwise direction of the linear light source is reduced. COPYRIGHT: (C)2005,JPO&NCIPI
|
