| 摘要 |
PROBLEM TO BE SOLVED: To oscillate the laser beam having the predetermined profile without requirement of aging of multiple shot. SOLUTION: Within each opposing surface R of a pair of discharge electrodes 2 and 3 forming the grow discharge of a gas laser oscillator, a low job function region 11a having the job junction which is smaller than that of the remaining region 10a within the opposing surface R is formed. The location where the low job function region 11a is formed at the opposing surface R is provided at the center where the least ultraviolet ray for auxiliary electrolytic dissociation reaches. The grow discharge can be generated with priority at the low job function region 11a. COPYRIGHT: (C)2005,JPO&NCIPI |
