| 摘要 |
PROBLEM TO BE SOLVED: To reliably suck a work such as a solar cell to be sucked while preventing the cracking thereof. SOLUTION: The suction device comprises a pad 1 having a plane suction face 11 with a number of suction ports for coming into contact with the work W, a cover 2 forming an air passage 22 to be in negative pressure between the pad 1 and itself, an upper material 4 opposed to a lower material 3 constituted by these, a spring 51 laid between these, inclined faces 52, 55, and a screw member 53 having a screw head 54 for coming into contact with the inclined faces. The cracking of the work is prevented by using the plane for sucking the work W with multipoint equal force. The suction face is freely moved and inclined to the direction of suction by the spring and the inclined supporting faces to secure suction performance so that the work can be sucked and held even when moved at a high speed perpendicularly to the direction of suction. COPYRIGHT: (C)2005,JPO&NCIPI |
