发明名称 Wafer supporting system for semiconductor wafers
摘要 The embodiments of the present invention include coating a semiconductor wafer with a polymer layer and attaching the polymer layer to a support substrate with a tape. The tape has at least two adhesive sides, and at least one radiation sensitive side. The radiation sensitive side facilitates release of the tape.
申请公布号 US2005147489(A1) 申请公布日期 2005.07.07
申请号 US20030745923 申请日期 2003.12.24
申请人 CHEN TIAN-AN;LU DAOQIANG 发明人 CHEN TIAN-AN;LU DAOQIANG
分类号 B66C17/08;H01L21/68;(IPC1-7):B66C17/08 主分类号 B66C17/08
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