发明名称 |
APPARATUS FOR MICRODEPOSITION OF MULTIPLE FLUID MATERIALS |
摘要 |
A PMD system (300) according to the invention deposits a fluid manufacturing material on a substrate (350). The PMD system (300) includes a first and second microdeposition head (320), each mounted on a head support (310) and held above a substrate (350). The first microdeposition head is operable to discharge droplets of a first fluid manufacturing material and the second microdeposition head is operable to discharge droplets of a second fluid manufacturing material. In one embodiment, a third microdeposition head is provided to discharge droplets of a third fluid manufacturing material. The control system is in electrical communication with said first, second and/or third microdeposition heads (320) and the stage (330) to coordinate the deposition of the first, second and/or third fluid manufacturing materials on the substrate (350). |
申请公布号 |
WO02099849(A3) |
申请公布日期 |
2005.07.07 |
申请号 |
WO2002US17370 |
申请日期 |
2002.05.31 |
申请人 |
LITREX CORPORATION;EDWARDS, CHARLES, O.;ALBERTALLI, DAVID |
发明人 |
EDWARDS, CHARLES, O.;ALBERTALLI, DAVID |
分类号 |
B05D1/26;B05C5/00;B05C9/12;B05C9/14;B05C11/00;B05C11/10;B05D3/00;B25B11/00;B29C67/00;B41J2/01;B41J2/04;B41J2/045;B41J2/05;B41J2/055;B41J3/407;B41J3/54;H01L21/00;H01L21/683;H01L23/12;H01L51/50;H05B33/10;H05K1/02;H05K3/06;H05K3/12;H05K13/04 |
主分类号 |
B05D1/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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