| 摘要 |
PROBLEM TO BE SOLVED: To provide a lens barrel which can desirably prevent the performance deterioration of an optical element by improving a gas replacement speed in a space between the optical elements, and to provide an aligner having such a lens barrel and a method of manufacturing a device manufactured by using the aligner. SOLUTION: In the lens barrel, a lens 18 is held by a lens holding member 24 in a frame 23 of each lens barrel module 16 for constituting the lens barrel 17. A blade member 25 which forms an oblique state is provided to project toward an interval (gap) L1 between outer peripheral edges of the lenses 18 on the inner wall surface of the frame 23, and a purge gas G flowing in the lens barrel 17 is guided to a narrow space S between the lenses. Further, a convex member 26 is projected toward the outer peripheral edge of the lens 18 on the inner wall surface of the frame 23, and performs the function of accelerating the flowing velocity of the purge gas G. COPYRIGHT: (C)2005,JPO&NCIPI
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