| 摘要 |
The invention relates to a device for polarization-specific examination of an optical system having a detector part that has polarization detector means for recording the exit state of polarization of radiation ( 6 ) emerging from the optical system, to an associated optical imaging system, and to a calibration method for the device. A device according to the invention includes polarization detector means with a polarizing grating structure ( 4 ). Provided as an alternative is a device for snapshot polarimetry having a birefringent element and downstream polarizer element that is suitable, also adequately polarizing nonquasi-parallel radiation. Use, for example, for determining the influencing of the state of polarization of UV radiation by a microlithographic projection objective.
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