摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for determining the quality of a piezoelectric component having high connection reliability in which misregistration of a piezoelectric element can be sorted easily. <P>SOLUTION: In the piezoelectric component where a capacitor element 20 is connected and secured to the upper surface of a base substrate 1 through conductive adhesive 40-42 and a piezoelectric element 10 utilizing thickness slip vibration is connected and secured onto the capacitor element 20 through conductive adhesive 43, 44, correlation exists between misregistration of the piezoelectric element 10 and the capacitor element 20 and the impedance characteristics of the piezoelectric component or the ripple in a band Δf of phase characteristics. Misregistration of the piezoelectric element 10 and the capacitor element 20 is detected by measuring ripple and comparing the magnitude thereof with a reference value. <P>COPYRIGHT: (C)2005,JPO&NCIPI |