发明名称 SYSTEM AND METHOD FOR MOVING OBJECT USING PIEZOELECTRIC ACTUATOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a system and a method for moving an object using a piezoelectric actuator. <P>SOLUTION: The system comprises several piezoelectric actuators capable of expanding/shear deforming. The expansion and the shear-deformation are used to respond to first and second control signals for grasping and moving an object. The displacement allowed to the object is limited by the maximum shear deformation of the piezoelectric actuator. In order to increase the allowed displacement, the piezoelectric actuator is controlled to execute a linear shear deformation sequence or a shuffle sequence. The object moves during the linear shear deformation sequence while the object is almost generated during the shuffle sequence, and the piezoelectric actuator is rearranged relative to the object during that period. After that, the linear shear deformation sequence can be used to further move the object. <P>COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005185094(A) 申请公布日期 2005.07.07
申请号 JP20040360963 申请日期 2004.12.14
申请人 ASML NETHERLANDS BV 发明人 HENDRIKS STEFAN GERTRUD M;MATTAAR THOMAS A;CATHARINA MARIA LEENHEERS GERARDUS JACOBUS CORNELIS
分类号 B81B3/00;B81B7/02;G03F7/20;H01L21/027;H01L41/09;H02N2/00 主分类号 B81B3/00
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