| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck table capable of processing not only a peripheral side surface but also an upper surface of a work by one time setting and a work feed and discharge device capable of efficiently feeding and discharging the work to this chuck table. SOLUTION: A pallet 21 made of a magnetic body by placing and fixing the work 22 made of a magnetic body in a state of being floated through a magnet 23 for work setting of a size to be stored within its flat surface area is attracted and fixed by a plurality of magnets 2 for chucking arranged flush on an upper surface of a table main body 1. COPYRIGHT: (C)2005,JPO&NCIPI
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