发明名称 |
Method and structure for layout of cell contact area for semiconductor integrated circuits |
摘要 |
An EEPROM integrated circuit structure. The structure has a substrate that includes a surface region. Preferably, the surface region is provided within a first cell region. The structure also has a gate dielectric layer of first thickness overlying the surface of the substrate region and a select gate overlying a first portion of the gate dielectric layer. A floating gate is overlying a second portion of the gate dielectric layer and is coupled to the select gate. An insulating layer is overlying the floating gate. A control gate is overlying the insulating layer and is coupled to the floating gate. A tunnel window provided in a stripe configuration is formed within a portion of the gate dielectric layer. The portion of the gate dielectric layer is characterized by a second thickness, which is less than the first thickness.
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申请公布号 |
US2005145929(A1) |
申请公布日期 |
2005.07.07 |
申请号 |
US20040773961 |
申请日期 |
2004.02.06 |
申请人 |
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION |
发明人 |
WU CHIA-TE;CAI JIAN-XIANG |
分类号 |
H01L21/8247;H01L27/115;H01L29/788;(IPC1-7):H01L29/792 |
主分类号 |
H01L21/8247 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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