New metal chelates of beta-ketiminate ligands, useful for depositing thin metal-containing layers, e.g. for electronic components

摘要

Metal chelates (I) containing beta -ketiminate ligands are new. Metal chelates of formula (I) containing beta -ketiminate ligands are new M(R)x (I) M : magnesium, aluminum, silicon, scandium, titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, gallium, germanium, arsenic, yttrium, zirconium, niobium, molybdenum, ruthenium, cadmium, indium, tin, antimony, hafnium, tantalum, tungsten, rhenium, lead, lanthanum, cerium, neodymium, samarium, europium, gadolinium, terbium, erbium or ytterbium; R : beta -ketiminate compound where the N atom of the imine function is substituted by (CH2)mN(R1>)2 and the carbon chain is substituted by R2>O(CH2)n; m : 2-4; R1>1-3C alkyl; R2>1-3C alkyl and n : 2-4. Independent claims are included for: (1) two methods for preparing (I); and (2) method for depositing a metal-containing layer on a substrate by using (I).