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发明名称
Optisches System für Projektion
摘要
申请公布号
DE69824658(T2)
申请公布日期
2005.07.07
申请号
DE19986024658T
申请日期
1998.04.02
申请人
NIKON CORP., TOKIO/TOKYO
发明人
KUDO, SHINTARO
分类号
G02B13/24;G02B9/12;G02B13/00;G03F7/20;H01L21/027;(IPC1-7):G02B13/00
主分类号
G02B13/24
代理机构
代理人
主权项
地址
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