FUNCTIONAL DROPLET DISCHARGE INSPECTION METHOD, FUNCTIONAL DROPLET DISCHARGE INSPECTION APPARATUS, DROPLET DISCHARGE APPARATUS PROVIDED WITH THE SAME, PRODUCTION METHOD OF ELECTROOPTICAL APPARATUS, ELECTROOPTICAL APPARATUS, AND ELECTRONIC APPLIANCE

摘要

PROBLEM TO BE SOLVED: To provide a functional droplet discharge inspection method capable of inspecting whether a nozzle of a functional droplet discharge head can discharge functional droplets normally or not without consuming the functional liquid in vain, an apparatus for the method and the like.

SOLUTION: The functional droplet discharge inspection apparatus comprises micro-vibration waveform application means 211 for applying micro-vibration waveform to a functional droplet discharge head 16 without discharge of functional droplet from a nozzle 65 and thereby rhythmically vibrating the meniscus M of the nozzle 65, meniscus displacement measurement means 131 for measuring the displacement of the rhythmically vibrating meniscus M, and judgement means 123 for determining whether the nozzle 65 can discharge the functional droplets normal or not.

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