| 摘要 |
PROBLEM TO BE SOLVED: To provide a chuck table for continuously and positively holding a suction plate at a correct height and in a correct position and easily performing replacement and attachment/detachment of the suction plate without damaging a base. SOLUTION: This chuck table is provided with the suction plate 1 formed of a porous material such as porous ceramics, and a base 2 having a plane 20 on which the suction plate 1 is arranged facing. The suction plate 1 is arranged on the plate 20 of the base 2, and the suction plate 4 and the base 2 are fixed using a suction plate fixing means 3. To be precise, the base 2 is clamped by the suction plate 1 and the head of a screw 30 of the suction plate fixing means 3, and the suction plate 1 is fixed to the base 2 in a tap bolt state in a sense. COPYRIGHT: (C)2005,JPO&NCIPI |
