| 摘要 |
PROBLEM TO BE SOLVED: To provide a cassette that can be applied to a large substrate by arranging supporting wires for linking a plurality of supporting bars at one end of the supporting bars. SOLUTION: The cassette includes a frame 210 and a plurality of slots 220 and 240 for classifying the frame 210 into a plurality of layers, wherein the slots 220 and 240 include a plurality of main supporting bars 220 extending in the horizontal direction from the frame 210 and a plurality of supporting wires 240 for linking the a plurality of main supporting bars 220 to each another, a buffer member 221 is formed on the a plurality of main supporting bars 220, and a substrate 110 is mounted on the buffer member 221. COPYRIGHT: (C)2005,JPO&NCIPI |
