ALIGNER, METHOD FOR MANUFACTURING DEVICE, AND MAINTAINING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an aligner capable of improving the operability of maintenance by providing the exposure device with a support member assisting an operation for disassembling the exposure device etc. SOLUTION: The aligner EX is equipped with a 1st support structure 110 which supports a projection optical system 30 irradiating a substrate with exposure light emitted from a mask, and a 2nd support structure 120 supporting a mask stage 20 which is stood on the 1st support structure 110 to hold the mask. Further, a support member 300 which abuts against the 2nd support structure is provided to support the 2nd support structure 120 perpendicularly apart from the 1st support structure 110. COPYRIGHT: (C)2005,JPO&NCIPI