摘要 |
PROBLEM TO BE SOLVED: To provide an electromagnetic wave shielding material having satisfactory permeability and absorptivity of electromagnetic wave for practical use, its manufacturing method, and a display at low cost. SOLUTION: The method is used to manufacture the electromagnetic wave shielding material having a transparent conductive film on its surface through a spattering step. In this spattering step, a phase shift mask is interposed between a metal target and a base film, and a metal is spattered from the metal target to the base film through the phase mask, so as to form the transparent electrode. The electromagnetic wave shielding material can be manufactured by the manufacturing method, and the display is provided with the electromagnetic wave shielding material. COPYRIGHT: (C)2005,JPO&NCIPI
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